Introduction to Micro-Electro-Mechanical Systems: Microfabrication techniques including: photolithography, etching, physical and chemical vapor deposition, electroplating, bonding and polymer processing. Application to sensors and actuators.
Requisites
Restrictions:
Must be enrolled in one of the following Campuses: Georgia Tech-Atlanta * (A)
All Instructors
GPA: 3.81Most Common: A (81.0%)
This total includes data from semesters with unknown instructors